Control Relevant Identi cation and Robust Motion Control of a Wafer Stage

Feedback Oriented Identi cation for Enhanced and Robust Control a fractional approach applied to a wafer stage

Prepr. 2nd IFAC Symp. on Robust Control Design pp. 43-48, 1997. LOW ORDER CONTROL DESIGN BY FEEDBACK RELEVANT IDENTIFICATION AND CLOSED LOOP CONTROLLER REDUCTION

An approach is presented that can be used to obtain low complexity controllers for an unknown system. In this approach, the identi cation of a set of models is used to represent the incomplete knowledge of the system. Subsequently, the set is used for the synthesis of a robust controller. In order to design low complexity controllers, the aim is to nd a low complexity representation of the set....

Identi cation of a Compact Disc Pick { up Mechanism

This paper discusses the control relevant parametric identi cation of a servo system present in a Compact Disc player. In this application an approximate closed loop identi cation problem is solved in order to come up with a linear multivariable discrete time model, suitable for control design. This identi cation problem is handled by a recently introduced two stage method. It yields an explici...

Multivariable feedback relevant system identification of a wafer stepper system

This paper discusses the approximate and feedback relevant parametric identi cation of a positioning mechanism present in a wafer stepper. The positioning mechanism in a wafer stepper is used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. The accurate positioning requires a robust and high performance feedback controller that...

Control Relevant Identi cation and Servo Design for a Compact Disc Player

The application of control relevant modeling of a radial servo loop in a CD (Compact Disc) player is presented in this chapter. The modeling is based on an identi cation algorithm that uses experimental data obtained from closedloop experiments to nd a low-order feedback relevant linear discrete time model for model-based servo control design. In this procedure a plant model is identi ed in ter...